Inventor · disambiguated record
Mario D. Silvetti
Also filed as: SILVETTI MARIO D · SILVETTI MARIO DAVE
11 granted patents·7 pending applications·849 citations·filing 2000–2025
91Inventor score
Top patents by PatentIndex Score
18 records- 0195US6413321B1Method and apparatus for reducing particle contamination on wafer backside during CVD processAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·679 cites·6 claims
- 0293US7332262B2Photolithography scheme using a silicon containing resistAPPLIED MATERIALS INC·Filed 2005·Granted Feb 19, 2008·23 cites·20 claims
- 0390US8599531B2Electrostatic end effector apparatus, systems and methodsSUNDAR SATISH·Filed 2010·Granted Dec 3, 2013·15 cites·25 claims
- 0489US6553932B2Reduction of plasma edge effect on plasma enhanced CVD processesAPPLIED MATERIALS INC·Filed 2001·Granted Apr 29, 2003·51 cites·58 claims
- 0588US6967072B2Photolithography scheme using a silicon containing resistAPPLIED MATERIALS INC·Filed 2001·Granted Nov 22, 2005·41 cites·49 claims
- 0686US6927178B2Nitrogen-free dielectric anti-reflective coating and hardmaskAPPLIED MATERIALS INC·Filed 2003·Granted Aug 9, 2005·32 cites·20 claims
- 0780US11713508B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·18 claims
- 0880US2025365819A1PBN Heaters For ALD Temperature UniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0968US7105460B2Nitrogen-free dielectric anti-reflective coating and hardmaskAPPLIED MATERIALS INC·Filed 2002·Granted Sep 12, 2006·8 cites·37 claims
- 1057US12408239B2PBN heaters for ALD temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Sep 2, 2025·0 cites·14 claims
- 1157US2023313378A1Methods of preventing metal contamination by ceramic heaterAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1255US12305284B2Apparatus and methods for fine planar non-uniformity improvementAPPLIED MATERIALS INC·Filed 2021·Granted May 20, 2025·0 cites·12 claims
- 1355US11976363B2Purge ring for pedestal assemblyAPPLIED MATERIALS INC·Filed 2021·Granted May 7, 2024·0 cites·15 claims
- 1450US2022367236A1Heater pedestal with improved uniformityAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1549US2023207345A1Base plate for heater pedestalAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1645US2020256228A1Vacuum Pumps For Single And Multi-Process Chamber Flow Stream SharingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1745US2022064785A1Apparatus and methods for gas phase particle reductionAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1832US2010178137A1Systems, apparatus and methods for moving substratesAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →