Inventor · disambiguated record
Mario David Silvetti
Also filed as: SILVETTI MARIO D · SILVETTI MARIO DAVE · SILVETTI MARIO DAVID
21 granted patents·8 pending applications·162 citations·filing 2002–2023
94Inventor score
Top patents by PatentIndex Score
29 records- 0191US7374393B2Method of retaining a substrate during a substrate transferring processAPPLIED MATERIALS INC·Filed 2006·Granted May 20, 2008·17 cites·4 claims
- 0290US11174553B2Gas distribution assembly for improved pump-purge and precursor deliveryAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·3 cites·17 claims
- 0390US7695232B2Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with sameAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·17 cites·18 claims
- 0490US7024105B2Substrate heater assemblyAPPLIED MATERIALS INC·Filed 2003·Granted Apr 4, 2006·56 cites·23 claims
- 0589US7582167B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·15 cites·5 claims
- 0685US7374391B2Substrate gripper for a substrate handling robotAPPLIED MATERIALS INC·Filed 2005·Granted May 20, 2008·9 cites·12 claims
- 0784US11173579B2Inner retaining ring and outer retaining ring for carrier headAPPLIED MATERIALS INC·Filed 2018·Granted Nov 16, 2021·1 cites·12 claims
- 0879US11081318B2Geometrically selective deposition of dielectric films utilizing low frequency biasAPPLIED MATERIALS INC·Filed 2018·Granted Aug 3, 2021·2 cites·20 claims
- 0979US9812344B2Wafer processing system with chuck assembly maintenance moduleAPPLIED MATERIALS INC·Filed 2015·Granted Nov 7, 2017·3 cites·18 claims
- 1079US7107125B2Method and apparatus for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2003·Granted Sep 12, 2006·19 cites·19 claims
- 1177US7997851B2Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with sameAPPLIED MATERIALS INC·Filed 2008·Granted Aug 16, 2011·5 cites·4 claims
- 1274US11396703B2Apparatus and methods for improving chemical utilization rate in deposition processAPPLIED MATERIALS INC·Filed 2020·Granted Jul 26, 2022·0 cites·20 claims
- 1373US11584992B2Gas distribution assembly for improved pump-purge and precursor deliveryAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·0 cites·14 claims
- 1471US11923172B2Paired dynamic parallel plate capacitively coupled plasmasAPPLIED MATERIALS INC·Filed 2022·Granted Mar 5, 2024·0 cites·17 claims
- 1563US6911403B2Methods of reducing plasma-induced damage for advanced plasma CVD dielectricsAPPLIED MATERIALS INC·Filed 2003·Granted Jun 28, 2005·5 cites·31 claims
- 1663US2009068356A1High productivity plasma processing chamberAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1762US11282676B2Paired dynamic parallel plate capacitively coupled plasmasAPPLIED MATERIALS INC·Filed 2019·Granted Mar 22, 2022·0 cites·19 claims
- 1862US7279049B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2004·Granted Oct 9, 2007·7 cites·13 claims
- 1958US7094313B2Universal mid-frequency matching networkAPPLIED MATERIALS INC·Filed 2004·Granted Aug 22, 2006·3 cites·21 claims
- 2058US2024141492A1Semiconductor manufacturing susceptor pocket edge for process improvementAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2153US2005229849A1High productivity plasma processing chamberAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2250US11692267B2Plasma induced modification of silicon carbide surfaceAPPLIED MATERIALS INC·Filed 2020·Granted Jul 4, 2023·0 cites·15 claims
- 2348US2006224276A1Method for monitoring the position of a semiconductor processing robotYIM PYONGWON·Filed 2006·Application pending·0 cites
- 2446US11581213B2Susceptor wafer chucks for bowed wafersAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 2546US2010145513A1Method for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2642US2006182535A1Cartesian robot designRICE MIKE·Filed 2005·Application pending·0 cites
- 2740US9646859B2Disk-brush cleaner module with fluid jetCHEN HUI·Filed 2010·Granted May 9, 2017·0 cites·19 claims
- 2838US2004018070A1Compact and high throughput semiconductor fabrication systemAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 2932US2016240405A1Stand alone anneal system for semiconductor wafersAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →