Inventor · disambiguated record
Matthias Slodowski
Also filed as: SLODOWSKI MATTHIAS
6 granted patents·84 citations·filing 2000–2009
81Inventor score
Top patents by PatentIndex Score
6 records- 0187US6456373B1Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrumentLEICA MICROSYSTEMS·Filed 2000·Granted Sep 24, 2002·54 cites·19 claims
- 0283US8148702B2Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patternsDOERING HANS-JOACHIM·Filed 2009·Granted Apr 3, 2012·16 cites·22 claims
- 0353US6618154B2Optical measurement arrangement, in particular for layer thickness measurementLEICA MICROSYSTEMS·Filed 2001·Granted Sep 9, 2003·7 cites·10 claims
- 0447US6775583B2Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software thereforeLEICA MICROSYSTEMS·Filed 2001·Granted Aug 10, 2004·5 cites·19 claims
- 0545US7349106B2Apparatus and method for thin-layer metrologyVISTEC SEMICONDUCTOR SYSTEMS J·Filed 2004·Granted Mar 25, 2008·2 cites·16 claims
- 0642US7277190B2Measurement system with an optical measurement arrangementVISTEC SEMICONDUCTOR SYSTEMS J·Filed 2004·Granted Oct 2, 2007·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →