Inventor · disambiguated record
Martin Frans Pierre Smeets
Also filed as: SMEETS MARTIN FRANS PIERRE
10 granted patents·4 pending applications·93 citations·filing 2004–2024
88Inventor score
Files withASML NETHERLANDS BV6CADEE THEODORUS PETRUS MARIA2ASML NETHERLANDS1COMPEN RENE THEODORUS PETRUS1GILISSEN NOUD JAN1
Top patents by PatentIndex Score
14 records- 0196US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0295US7304715B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·52 cites·39 claims
- 0394US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0489US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 0588US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 0686US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 0776US9013682B2Clamping device and object loading methodCOMPEN RENE THEODORUS PETRUS·Filed 2008·Granted Apr 21, 2015·5 cites·42 claims
- 0864US2025132122A1Assessment apparatus and methodsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0963US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 1062US8913228B2Lithographic apparatus and device manufacturing methodWIJCKMANS MAURICE·Filed 2007·Granted Dec 16, 2014·2 cites·39 claims
- 1148US8446560B2Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing methodMOORS JOHANNES HUBERTUS JOSEPHINA·Filed 2009·Granted May 21, 2013·0 cites·7 claims
- 1242US2009086187A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS·Filed 2008·Application pending·0 cites
- 1336US2012078561A1Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic ApparatusKNIJN PAULUS JOHANNES·Filed 2011·Application pending·0 cites
- 1432US2013146785A1Support, lithographic apparatus and device manufacturing methodGILISSEN NOUD JAN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →