Inventor · disambiguated record
Manuel Sohn
Also filed as: SOHN MANUEL
7 granted patents·4 pending applications·4 citations·filing 2021–2025
73Inventor score
Top patents by PatentIndex Score
11 records- 0188US12068177B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Aug 20, 2024·2 cites·11 claims
- 0284US11955315B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Apr 9, 2024·2 cites·20 claims
- 0373US2025314267A1Workpiece Support For A Thermal Processing SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2025·Application pending·0 cites
- 0470US2024379390A1Rapid Thermal Processing System With Cooling SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 0569US12442078B2Workpiece processing apparatus with gas showerhead assemblyMATTSON TECH INC·Filed 2021·Granted Oct 14, 2025·0 cites·14 claims
- 0669US12308209B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted May 20, 2025·0 cites·15 claims
- 0769US2025096032A1Support Structure for Thermal Processing SystemsMATTSON TECH INC·Filed 2024·Application pending·0 cites
- 0865US12352306B2Workpiece support for a thermal processing systemMATTSON TECH INC·Filed 2021·Granted Jul 8, 2025·0 cites·15 claims
- 0958US12176241B2Support structure for thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Dec 24, 2024·0 cites·18 claims
- 1050US12362194B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·13 claims
- 1148US2022199376A1Workpiece Processing Apparatus with Vacuum Anneal Reflector ControlMATTSON TECH INC·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →