Inventor · disambiguated record
Mark Sowa
Also filed as: SOWA MARK · SOWA MARK J
2 granted patents·4 pending applications·0 citations·filing 2014–2019
25Inventor score
Files withULTRATECH INC6
Top patents by PatentIndex Score
6 records- 0164US10351950B2Plasma enhanced ALD systemULTRATECH INC·Filed 2014·Granted Jul 16, 2019·0 cites·10 claims
- 0264US2019284689A1Plasma Enhanced ALD SystemULTRATECH INC·Filed 2019·Application pending·0 cites
- 0336US9318319B2Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generationULTRATECH INC·Filed 2015·Granted Apr 19, 2016·0 cites·20 claims
- 0435US2018200753A1Methods of Forming MLD Films Using Polyols With Long Carbon BackbonesULTRATECH INC·Filed 2018·Application pending·0 cites
- 0529US2017241019A1Pe-ald methods with reduced quartz-based contaminationULTRATECH INC·Filed 2017·Application pending·0 cites
- 0629US2017194204A1Improved through silicon viaULTRATECH INC·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →