Inventor · disambiguated record
Manjunath Subbanna
Also filed as: SUBBANNA MANJUNATH
6 granted patents·8 pending applications·2 citations·filing 2016–2025
68Inventor score
Top patents by PatentIndex Score
14 records- 0187US12091749B2Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outletAPPLIED MATERIALS INC·Filed 2021·Granted Sep 17, 2024·1 cites·18 claims
- 0286US12060651B2Chamber architecture for epitaxial deposition and advanced epitaxial film applicationsAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·1 cites·20 claims
- 0380US2024337020A1Gas injector for epitaxy and cvd chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0477US2025246461A1Multi-zone lamp heating and temperature monitoring in epitaxy process chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0573US2024209544A1Chamber architecture for epitaxial deposition and advanced epitaxial film applicationsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0671US12018372B2Gas injector for epitaxy and CVD chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 25, 2024·0 cites·20 claims
- 0768US2022367216A1Multi-zone lamp heating and temperature monitoring in epitaxy process chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0865US12467144B2Methods of correlating zones of processing chambers, and related systems and methodsAPPLIED MATERIALS INC·Filed 2022·Granted Nov 11, 2025·0 cites·13 claims
- 0964US2025003112A1Virtual sensor for predicting and monitoring temperature of chamber componentsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1063US2024021444A1Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operationsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1162US12428731B2Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustabilityAPPLIED MATERIALS INC·Filed 2022·Granted Sep 30, 2025·0 cites·22 claims
- 1252US2023352322A1Multi-zone lamp heating for chemical vapor depositionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1349US2023290614A1Heat shield assemblies for minimizing heat radiation to pump of process chamberAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1432US10403806B2Light emitting diode assembly using thermal pyrolytic graphite for thermal managementMOMENTIVE PERFORMANCE MAT INC·Filed 2016·Granted Sep 3, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →