Inventor · disambiguated record
Masahiro Tabata
Also filed as: TABATA MASAHIRO
49 granted patents·4 pending applications·58 citations·filing 1997–2022
97Inventor score
Top patents by PatentIndex Score
53 records- 0195US7722257B2Roller bearing cage and tapered roller bearingJTEKT CORP·Filed 2007·Granted May 25, 2010·22 cites·12 claims
- 0289US10381236B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2018·Granted Aug 13, 2019·5 cites·20 claims
- 0386US10319613B2Method of selectively etching first region made of silicon nitride against second region made of silicon oxideTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·3 cites·13 claims
- 0483US11488836B2Apparatus for substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Nov 1, 2022·1 cites·19 claims
- 0581US11133192B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Sep 28, 2021·2 cites·19 claims
- 0681US10553446B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2019·Granted Feb 4, 2020·2 cites·21 claims
- 0780US11658036B2Apparatus for processing substrateTOKYO ELECTRON LTD·Filed 2022·Granted May 23, 2023·0 cites·20 claims
- 0879US10755944B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Aug 25, 2020·2 cites·16 claims
- 0977US11735423B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·20 claims
- 1076US11139175B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2019·Granted Oct 5, 2021·1 cites·15 claims
- 1176US10600660B2Method of selectively etching first region made of silicon nitride against second region made of silicon oxideTOKYO ELECTRON LTD·Filed 2019·Granted Mar 24, 2020·1 cites·20 claims
- 1275US11289339B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 29, 2022·1 cites·15 claims
- 1374US11380551B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2020·Granted Jul 5, 2022·0 cites·13 claims
- 1471US10903085B2Method for etching organic regionTOKYO ELECTRON LTD·Filed 2019·Granted Jan 26, 2021·1 cites·19 claims
- 1569US12308241B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted May 20, 2025·0 cites·19 claims
- 1669US12051595B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 30, 2024·0 cites·20 claims
- 1769US11322354B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2020·Granted May 3, 2022·0 cites·16 claims
- 1869US7926817B2Sealing apparatus and bearing apparatus having the sameJTEKT CORP·Filed 2008·Granted Apr 19, 2011·4 cites·5 claims
- 1967US11637025B2Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxideTOKYO ELECTRON LTD·Filed 2020·Granted Apr 25, 2023·0 cites·18 claims
- 2065US11594422B2Film etching method for etching filmTOKYO ELECTRON LTD·Filed 2021·Granted Feb 28, 2023·0 cites·12 claims
- 2165US11574806B2Film forming methodTOKYO ELECTRON LTD·Filed 2020·Granted Feb 7, 2023·0 cites·11 claims
- 2264US12476115B2Method for processing workpieceTOKYO ELECTRON LTD·Filed 2021·Granted Nov 18, 2025·0 cites·16 claims
- 2364US11127598B2Film etching method for etching filmTOKYO ELECTRON LTD·Filed 2020·Granted Sep 21, 2021·0 cites·19 claims
- 2464US10475659B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2018·Granted Nov 12, 2019·0 cites·18 claims
- 2564US2019214265A1Method of processing target objectTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2662US12325919B2Apparatus for processing substrateTOKYO ELECTRON LTD·Filed 2020·Granted Jun 10, 2025·0 cites·18 claims
- 2762US2020111679A1Etching methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2861US11239090B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 1, 2022·0 cites·18 claims
- 2961US10923332B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 16, 2021·0 cites·12 claims
- 3061US10217643B2Method of processing target objectTOKYO ELECTRON LTD·Filed 2017·Granted Feb 26, 2019·0 cites·16 claims
- 3160US11145518B2Method and apparatus for etching target objectTOKYO ELECTRON LTD·Filed 2019·Granted Oct 12, 2021·0 cites·23 claims
- 3260US10748766B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Aug 18, 2020·0 cites·18 claims
- 3359US8063002B2Rolling device and rolling device manufacturing methodKITAHATA KOUJI·Filed 2008·Granted Nov 22, 2011·2 cites·18 claims
- 3458US10781519B2Method and apparatus for processing substrateTOKYO ELECTRON LTD·Filed 2018·Granted Sep 22, 2020·0 cites·21 claims
- 3557US10777425B2Method of processing substrateTOKYO ELECTRON LTD·Filed 2018·Granted Sep 15, 2020·0 cites·20 claims
- 3655US10672605B2Film forming methodTOKYO ELECTRON LTD·Filed 2018·Granted Jun 2, 2020·0 cites·19 claims
- 3754US11574814B2Substrate and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Feb 7, 2023·0 cites·8 claims
- 3854US10541147B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Jan 21, 2020·0 cites·11 claims
- 3954US10483118B2Etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 19, 2019·0 cites·13 claims
- 4053US11081360B2Method for processing workpieceTOKYO ELECTRON LTD·Filed 2017·Granted Aug 3, 2021·0 cites·15 claims
- 4153US10559472B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 11, 2020·0 cites·18 claims
- 4253US8202006B2Sealing device, rolling bearing, and rolling bearing for wheelTABATA MASAHIRO·Filed 2007·Granted Jun 19, 2012·2 cites·11 claims
- 4353US7126884B2Magneto-optical recording medium having multiple magnetic layersVICTOR COMPANY OF JAPAN·Filed 2003·Granted Oct 24, 2006·2 cites·4 claims
- 4451US10707100B2Processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
- 4550US2022005700A1Method and apparatus for etching target objectTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 4648US10916420B2Processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 9, 2021·0 cites·23 claims
- 4747US2010272382A1Sealing device, rolling bearing and rolling bearing for wheelYAMAMOTO KAZUTOSHI·Filed 2008·Application pending·0 cites
- 4846US10269578B2Etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Apr 23, 2019·0 cites·16 claims
- 4946US5903526AMagneto-optical recording medium having multiple magnetic layersVICTOR COMPANY OF JAPAN·Filed 1997·Granted May 11, 1999·7 cites·12 claims
- 5044US10504741B2Semiconductor manufacturing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 10, 2019·0 cites·9 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →