Inventor · disambiguated record
Mana Tanabe
Also filed as: TANABE MANA
6 granted patents·2 pending applications·2 citations·filing 2018–2023
67Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0173US11061324B2Manufacturing method of replica template, manufacturing method of semiconductor device, and master templateTOSHIBA MEMORY CORP·Filed 2018·Granted Jul 13, 2021·2 cites·14 claims
- 0266US11776823B2Substrate processing method and substrate processing apparatusKIOXIA CORP·Filed 2022·Granted Oct 3, 2023·0 cites·14 claims
- 0363US11682566B2Processing apparatus for processing substrates of different typesKIOXIA CORP·Filed 2021·Granted Jun 20, 2023·0 cites·15 claims
- 0457US11443963B2Substrate processing method and substrate processing apparatusKIOXIA CORP·Filed 2019·Granted Sep 13, 2022·0 cites·12 claims
- 0555US2024096653A1Substrate treatment apparatus and method for treating substrateSHIBAURA MECHATRONICS CORP·Filed 2023·Application pending·0 cites
- 0650US2019221452A1Processing apparatusTOSHIBA MEMORY CORP·Filed 2018·Application pending·0 cites
- 0745US11123774B2Substrate processing method, substrate processing apparatus, and composite processing apparatusTOSHIBA MEMORY CORP·Filed 2019·Granted Sep 21, 2021·0 cites·5 claims
- 0842US11185895B2Substrate processing method, substrate processing apparatus, and composite processing apparatusTOSHIBA MEMORY CORP·Filed 2019·Granted Nov 30, 2021·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →