Inventor · disambiguated record

Martin Tilke

Also filed as: TILKE MARTIN

1 granted patent·2 pending applications·0 citations·filing 2020–2023

10Inventor score

Technology areasH10P G03F

Files withASML NETHERLANDS BV1 JENOPTIK OPTICAL SYS GMBH1 JENOPTIK OPTICAL SYSTEM GMBH1

Top patents by PatentIndex Score

3 records

0151US11774868B2Image sensor for immersion lithographyASML NETHERLANDS BV·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
0243US2025308911A1Method and carrier substrate for producing a semiconductor componentJENOPTIK OPTICAL SYSTEM GMBH·Filed 2023·Application pending·0 cites
0338US2024304446A1Method of producing an etching mask, method of etching a structure into a substrate, use of a tetrel layer and structure for producing a maskJENOPTIK OPTICAL SYS GMBH·Filed 2022·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →