Inventor · disambiguated record
Masaki Tokunaga
Also filed as: TOKUNAGA MASAKI
3 granted patents·1 pending application·409 citations·filing 2016–2021
72Inventor score
Files withASM IP HOLDING BV4
Top patents by PatentIndex Score
4 records- 0197US10435790B2Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gapASM IP HOLDING BV·Filed 2016·Granted Oct 8, 2019·397 cites·19 claims
- 0293US9818601B1Substrate processing apparatus and method of processing substrateASM IP HOLDING BV·Filed 2016·Granted Nov 14, 2017·12 cites·7 claims
- 0342US11037780B2Method for manufacturing semiconductor device with helium-containing gasASM IP HOLDING BV·Filed 2017·Granted Jun 15, 2021·0 cites·10 claims
- 0440US2021225643A1Method for deposition of silicon nitride layer using pretreatment, structure formed using the method, and system for performing the methodASM IP HOLDING BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →