Inventor · disambiguated record
Mayo Uda
Also filed as: UDA Mayo
6 granted patents·5 pending applications·1 citations·filing 2015–2023
67Inventor score
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0177US11562889B2Plasma processing apparatus and gas introducing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jan 24, 2023·1 cites·12 claims
- 0273US11832373B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 28, 2023·0 cites·20 claims
- 0373US2024049379A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0465US11348768B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 31, 2022·0 cites·13 claims
- 0559US2021320009A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0657US11470712B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 11, 2022·0 cites·15 claims
- 0748US2016260582A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0846US2019131136A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0946US2021193439A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1038US10510514B2Gas supply mechanism and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Dec 17, 2019·0 cites·13 claims
- 1134US10950467B2Gas supply mechanism and semiconductor manufacturing systemTOKYO ELECTRON LTD·Filed 2017·Granted Mar 16, 2021·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →