Inventor · disambiguated record

Markus Theodoor Wilhelmus Van Der Heijden

Also filed as: VAN DER HEIJDEN MARKUS THEODOO

1 granted patent·0 citations·filing 2005–2005

13Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0145US7342642B2Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 11, 2008·0 cites·14 claims

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