Inventor · disambiguated record
Martijn Petrus Christianus Van Heumen
Also filed as: VAN HEUMEN MARTIJN PETRUS CHRISTIANUS
14 granted patents·1 pending application·36 citations·filing 2014–2024
89Inventor score
Files withASML NETHERLANDS BV15
Top patents by PatentIndex Score
15 records- 0195US12217930B2Systems and methods for thermally conditioning a wafer in a charged particle beam apparatusASML NETHERLANDS BV·Filed 2023·Granted Feb 4, 2025·2 cites·20 claims
- 0294US11804358B2System and methods for thermally conditioning a wafer in a charged particle beam apparatusASML NETHERLANDS BV·Filed 2021·Granted Oct 31, 2023·2 cites·20 claims
- 0393US11139141B2Systems and methods for thermally conditioning a wafer in a charged particle beam apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 5, 2021·7 cites·18 claims
- 0492US9814126B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 7, 2017·9 cites·26 claims
- 0589US10420197B2Radiation source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Sep 17, 2019·5 cites·6 claims
- 0688US9924585B2Radiation source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 20, 2018·7 cites·22 claims
- 0785US9913357B2Radiation source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 6, 2018·4 cites·26 claims
- 0884US12354891B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2024·Granted Jul 8, 2025·0 cites·20 claims
- 0977US11942340B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2022·Granted Mar 26, 2024·0 cites·15 claims
- 1076US12249480B2Fluid transfer system in a charged particle systemASML NETHERLANDS BV·Filed 2024·Granted Mar 11, 2025·0 cites·15 claims
- 1163US11996262B2Fluid transfer system in a charged particle systemASML NETHERLANDS BV·Filed 2021·Granted May 28, 2024·0 cites·14 claims
- 1263US11430678B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 30, 2022·0 cites·15 claims
- 1353US11764027B2Systems and methods of cooling objective lens of a charged-particle beam systemASML NETHERLANDS BV·Filed 2019·Granted Sep 19, 2023·0 cites·17 claims
- 1444US2023332669A1Vacuum system for mitigating damage due to a vacuum pump malfunctionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1541US10948421B2Laser-driven photon source and inspection apparatus including such a laser-driven photon sourceASML NETHERLANDS BV·Filed 2015·Granted Mar 16, 2021·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →