Inventor · disambiguated record
Mark S. Wanta
Also filed as: WANTA MARK · WANTA MARK S
2 granted patents·1 pending application·96 citations·filing 1987–2013
67Inventor score
Top patents by PatentIndex Score
3 records- 0176US5621813APattern recognition alignment systemULTRATECH STEPPER INC·Filed 1995·Granted Apr 15, 1997·68 cites·16 claims
- 0273US4880309ADark field target design system for alignment of semiconductor wafersGEN SIGNAL CORP·Filed 1987·Granted Nov 14, 1989·28 cites·4 claims
- 0347US2015013218A1Fence and Post BarrierWANTA MARK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →