Inventor · disambiguated record
Mark Wiepking
Also filed as: WIEPKING MARK
3 granted patents·1 pending application·50 citations·filing 1998–2004
72Inventor score
Files withLAM RES CORP3
Top patents by PatentIndex Score
4 records- 0174US6562187B2Methods and apparatus for determining an etch endpoint in a plasma processing systemLAM RES CORP·Filed 2001·Granted May 13, 2003·16 cites·24 claims
- 0266US6228278B1Methods and apparatus for determining an etch endpoint in a plasma processing systemLAM RES CORP·Filed 1998·Granted May 8, 2001·28 cites·10 claims
- 0365US7193173B2Reducing plasma ignition pressureLAM RES CORP·Filed 2004·Granted Mar 20, 2007·6 cites·39 claims
- 0438US2003183335A1Methods and apparatus for determining an etch endpoint in a plasma processing systemFiled 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mark Wiepking files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →