Inventor · disambiguated record
Masamichi Yachi
Also filed as: YACHI Masamichi
3 granted patents·6 pending applications·4 citations·filing 2013–2025
57Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0186US11846025B2Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method thereforKOKUSAI ELECTRIC CORP·Filed 2020·Granted Dec 19, 2023·2 cites·9 claims
- 0274US2025327176A1Processing apparatus and exhaust systemKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0369US2024076780A1Substrate processing apparatus and exhaust system capable of adjusting inner pressure of process chamber thereof, and method thereofKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0462US12365982B2Processing apparatus and exhaust systemKOKUSAI ELECTRIC CORP·Filed 2020·Granted Jul 22, 2025·0 cites·8 claims
- 0562US9548229B2Substrate processing apparatus, method of processing substrate, and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2013·Granted Jan 17, 2017·2 cites·10 claims
- 0660US2024426377A1Seal assembly, substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0757US2024105477A1Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0854US2023332288A1Substrate processing apparatus, method of manufacturing semiconductor device, pressure control device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0951US2023095537A1System, substrate processing apparatus, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →