Inventor · disambiguated record
Masahiko Yokoi
Also filed as: YOKOI MASAHIKO
4 granted patents·2 pending applications·42 citations·filing 1992–2024
65Inventor score
Top patents by PatentIndex Score
6 records- 0178US5355633AMethod of grinding a workpiece having plural cylindrical portions with plural grinding wheelsTOYODA MACHINE WORKS LTD·Filed 1992·Granted Oct 18, 1994·42 cites·4 claims
- 0263US12400863B2Method for etching for semiconductor fabricationTOKYO ELECTRON LTD·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 0360US12308212B2In-situ adsorbate formation for plasma etch processTOKYO ELECTRON LTD·Filed 2022·Granted May 20, 2025·0 cites·16 claims
- 0460US2024412955A1Temperature adjusting system, temperature adjusting method, substrate processing method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0555US12368050B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 22, 2025·0 cites·12 claims
- 0651US2024112888A1In-Situ Adsorbate Formation for Dielectric EtchTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →