Inventor · disambiguated record
Markus Zenzinger
Also filed as: ZENZINGER MARKUS
3 granted patents·4 pending applications·100 citations·filing 2004–2012
72Inventor score
Top patents by PatentIndex Score
7 records- 0195US7847921B2Microlithographic exposure method as well as a projection exposure system for carrying out the methodZEISS CARL SMT AG·Filed 2008·Granted Dec 7, 2010·30 cites·7 claims
- 0295US7408616B2Microlithographic exposure method as well as a projection exposure system for carrying out the methodZEISS CARL SMT AG·Filed 2004·Granted Aug 5, 2008·70 cites·44 claims
- 0351US8767181B2Microlithographic exposure method as well as a projection exposure system for carrying out the methodGRUNER TORALF·Filed 2010·Granted Jul 1, 2014·0 cites·19 claims
- 0441US2012153189A1Optical system for generating a light beam for treating a substrateWANGLER JOHANNES·Filed 2012·Application pending·0 cites
- 0538US2007263199A1Illumination System for a Microlithography Projection Exposure InstallationZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 0638US2006204204A1Method for improving the optical polarization properties of a microlithographic projection exposure apparatusZENZINGER MARKUS·Filed 2005·Application pending·0 cites
- 0735US2004218271A1Retardation element made from cubic crystal and an optical system therewithZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →