Inventor · disambiguated record
Megan Carruth
Also filed as: CARRUTH MEGAN
2 granted patents·5 pending applications·2 citations·filing 2019–2024
35Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0185US11264212B1Ion angle detectorTOKYO ELECTRON LTD·Filed 2020·Granted Mar 1, 2022·2 cites·20 claims
- 0257US2025226179A1Method and system for plasma processTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0356US2025291076A1Grid-less ion angle detectorTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0456US2025292994A1Grid-less ion energy detectorTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0553US2025246418A1Sensor in chamber insert ring assemblyTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0652US2025364211A1System and method for plasma processTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0747US11393662B2Apparatuses and methods for plasma processingTOKYO ELECTRON LTD·Filed 2019·Granted Jul 19, 2022·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →