Inventor · disambiguated record

Megan Doppel

Also filed as: DOPPEL MEGAN

2 granted patents·2 citations·filing 2014–2018

37Inventor score

Technology areasH01J H10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0168US10510512B2Methods and systems for controlling plasma performanceTOKYO ELECTRON LTD·Filed 2018·Granted Dec 17, 2019·1 cites·20 claims
0259US10424462B2Multi-cell resonator microwave surface-wave plasma apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Sep 24, 2019·1 cites·21 claims

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Megan Doppel — Patent Inventor | PatentIndex