Inventor · disambiguated record
Megha Rathod
Also filed as: RATHOD MEGHA
1 granted patent·2 pending applications·19 citations·filing 2011–2017
39Inventor score
Top patents by PatentIndex Score
3 records- 0193US10283404B2Selective deposition of WCN barrier/adhesion layer for interconnectLAM RES CORP·Filed 2017·Granted May 7, 2019·19 cites·20 claims
- 0243US2015118863A1Methods and apparatus for forming flowable dielectric films having low porosityLAM RES CORP·Filed 2014·Application pending·0 cites
- 0334US2012149213A1Bottom up fill in high aspect ratio trenchesNITTALA LAKSHMINARAYANA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →