Inventor · disambiguated record
Mehmet Derya Tetiker
Also filed as: TETIKER MEHMET DERYA
15 granted patents·2 pending applications·141 citations·filing 2013–2021
92Inventor score
Top patents by PatentIndex Score
17 records- 0197US10254641B2Layout pattern proximity correction through fast edge placement error predictionLAM RES CORP·Filed 2016·Granted Apr 9, 2019·32 cites·25 claims
- 0296US10572697B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2018·Granted Feb 25, 2020·9 cites·34 claims
- 0396US9996647B2Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimizationLAM RES CORP·Filed 2017·Granted Jun 12, 2018·12 cites·31 claims
- 0496US9792393B2Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimizationLAM RES CORP·Filed 2016·Granted Oct 17, 2017·19 cites·34 claims
- 0595US10534257B2Layout pattern proximity correction through edge placement error predictionLAM RES CORP·Filed 2017·Granted Jan 14, 2020·17 cites·14 claims
- 0693US10303830B2Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimizationLAM RES CORP·Filed 2018·Granted May 28, 2019·9 cites·29 claims
- 0793US10032681B2Etch metric sensitivity for endpoint detectionLAM RES CORP·Filed 2016·Granted Jul 24, 2018·25 cites·39 claims
- 0890US10997345B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2020·Granted May 4, 2021·3 cites·34 claims
- 0990US10386828B2Methods and apparatuses for etch profile matching by surface kinetic model optimizationLAM RES CORP·Filed 2015·Granted Aug 20, 2019·8 cites·33 claims
- 1082US11704463B2Method of etch model calibration using optical scatterometryLAM RES CORP·Filed 2021·Granted Jul 18, 2023·1 cites·24 claims
- 1174US9640371B2System and method for detecting a process point in multi-mode pulse processesLAM RES CORP·Filed 2014·Granted May 2, 2017·2 cites·17 claims
- 1274US9359250B2Substrate ion exchange systems with single- and multi-component ion exchange baths and methods for maintaining such systemsCORNING INC·Filed 2014·Granted Jun 7, 2016·3 cites·6 claims
- 1371US10242849B2System and method for detecting a process point in multi-mode pulse processesLAM RES CORP·Filed 2017·Granted Mar 26, 2019·1 cites·18 claims
- 1450US9290410B2Method for sludge control in wet acid etchingCORNING INC·Filed 2013·Granted Mar 22, 2016·0 cites·14 claims
- 1547US2014345325A1Double ion exchange processCORNING INC·Filed 2014·Application pending·0 cites
- 1642US10683234B2Methods of making antimicrobial glass articlesCORNING INC·Filed 2015·Granted Jun 16, 2020·0 cites·28 claims
- 1739US2019049937A1Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimizationLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →