Inventor · disambiguated record
Megan Wooley
Also filed as: WOOLEY MEGAN
3 granted patents·1 pending application·5 citations·filing 2020–2023
56Inventor score
Top patents by PatentIndex Score
4 records- 0192US11869756B2Virtual metrology enhanced plasma process optimization methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·3 cites·20 claims
- 0285US12112107B2Virtual metrology for wafer result predictionTOKYO ELECTRON LTD·Filed 2020·Granted Oct 8, 2024·2 cites·12 claims
- 0356US11868119B2Method and process using fingerprint based semiconductor manufacturing process fault detectionTOKYO ELECTRON LTD·Filed 2021·Granted Jan 9, 2024·0 cites·14 claims
- 0455US2024025289A1System and method for fulfilling requests for electric energy servicesHYLIION INC·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →