Inventor · disambiguated record
Mengxin Zhao
Also filed as: ZHAO MENGXIN
10 granted patents·3 pending applications·13 citations·filing 2010–2019
81Inventor score
Files withBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD9BEIJING NMC CO LTD2CHEN PENG1ZHAO MENGXIN1
Top patents by PatentIndex Score
13 records- 0181US10622224B2Precleaning chamber and plasma processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted Apr 14, 2020·4 cites·18 claims
- 0276US10347470B2Process chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Jul 9, 2019·4 cites·10 claims
- 0372US11282735B2Electrostatic chuck and semiconductor equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 22, 2022·2 cites·20 claims
- 0469US11328940B2Degassing chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted May 10, 2022·1 cites·16 claims
- 0560US10287686B2Hot plate and substrate processing equipment using the sameZHAO MENGXIN·Filed 2011·Granted May 14, 2019·2 cites·15 claims
- 0649US11107665B2Feeding structure, upper electrode assembly, and physical vapor deposition chamber and deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·20 claims
- 0748US11282682B2Magnetron drive mechanism, magnetron assembly and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 22, 2022·0 cites·18 claims
- 0842US10273572B2Heating chamber and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2014·Granted Apr 30, 2019·0 cites·18 claims
- 0941US12252776B2Carrying device and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Mar 18, 2025·0 cites·12 claims
- 1040US2016329228A1Cassette positioning device and semiconductor processing apparatusBEIJING NMC CO LTD·Filed 2014·Application pending·0 cites
- 1139US2019218660A1Degassing method, degassing chamber, and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Application pending·0 cites
- 1236US10984993B2Plasma processing apparatusCHEN PENG·Filed 2010·Granted Apr 20, 2021·0 cites·19 claims
- 1330US2016148789A1Pre-cleaning chamber and a semiconductor processing apparatus containing the sameBEIJING NMC CO LTD·Filed 2016·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mengxin Zhao files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →