Inventor · disambiguated record
Mitsuhiro Akatsu
Also filed as: AKATSU MITSUHIRO
1 granted patent·1 pending application·0 citations·filing 2010–2014
1Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0138US2016258908A1Method for evaluating atomic vacancy in surface layer of silicon wafer and apparatus for evaluating the sameUNIV NIIGATA·Filed 2014·Application pending·0 cites
- 0227US8578777B2Method for quantitatively evaluating concentration of atomic vacancies existing in silicon wafer, method for manufacturing silicon wafer, and silicon wafer manufactured by the method for manufacturing silicon waferGOTO TERUTAKA·Filed 2010·Granted Nov 12, 2013·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →