Inventor · disambiguated record
Mitchell Brooks
Also filed as: BROOKS MITCHELL
4 granted patents·21 citations·filing 2017–2020
72Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0196US11211253B2Atomic layer deposition and etch in a single plasma chamber for critical dimension controlLAM RES CORP·Filed 2020·Granted Dec 28, 2021·8 cites·18 claims
- 0292US10734238B2Atomic layer deposition and etch in a single plasma chamber for critical dimension controlLAM RES CORP·Filed 2017·Granted Aug 4, 2020·10 cites·18 claims
- 0378US10658174B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2017·Granted May 19, 2020·3 cites·12 claims
- 0460US11170997B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2020·Granted Nov 9, 2021·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →