Inventor · disambiguated record

Michael Cheseaux

Also filed as: CHESEAUX MICHAEL

1 granted patent·1 pending application·0 citations·filing 2016–2017

3Inventor score

Technology areasH01J

Files withEVATEC AG2

Top patents by PatentIndex Score

2 records

0126US2019252166A1Sputtering sourceEVATEC AG·Filed 2017·Application pending·0 cites
0219US10889890B2Vacuum processing apparatus and method for vacuum processing substratesEVATEC AG·Filed 2016·Granted Jan 12, 2021·0 cites·9 claims

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