Inventor · disambiguated record
Michael Erath
Also filed as: ERATH MICHAEL
10 granted patents·26 citations·filing 2000–2022
83Inventor score
Files withZEISS CARL SMT GMBH7BERTHOLD GMBH & CO KG1PERKIN ELMER BODENSEEWERK GMBH1PERKINELMER INSTRUMENTS LLC1
Top patents by PatentIndex Score
10 records- 0176US9448384B2Arrangement for mounting an optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Sep 20, 2016·3 cites·27 claims
- 0272US10254664B2Device for aligning a componentZEISS CARL SMT GMBH·Filed 2018·Granted Apr 9, 2019·1 cites·20 claims
- 0366US10809636B2Optical arrangement, in particular lithography systemZEISS CARL SMT GMBH·Filed 2019·Granted Oct 20, 2020·2 cites·20 claims
- 0466US6448565B1Unit for a plasma atomizer device with plasma gas-supply means, sample atomizer means and sample injection meansPERKIN ELMER BODENSEEWERK GMBH·Filed 2000·Granted Sep 10, 2002·13 cites·22 claims
- 0562US12298675B2Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damperZEISS CARL SMT GMBH·Filed 2022·Granted May 13, 2025·0 cites·22 claims
- 0659US6829048B2Flame atomization deviceBERTHOLD GMBH & CO KG·Filed 2002·Granted Dec 7, 2004·4 cites·25 claims
- 0752US10761436B2Optical arrangement, in particular lithography system, with a transport lockZEISS CARL SMT GMBH·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 0847US10571816B2Assembly in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Feb 25, 2020·0 cites·19 claims
- 0946US6618139B2Torch glassware for use with inductively coupled plasma-optical emission spectrometerPERKINELMER INSTRUMENTS LLC·Filed 2001·Granted Sep 9, 2003·3 cites·18 claims
- 1045US11537052B2Weight-force compensation deviceZEISS CARL SMT GMBH·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →