Inventor · disambiguated record
Michael Goss
Also filed as: EXALL DOUGLAS I · GOSS MICHAEL · GOSS MICHAEL J
10 granted patents·1 pending application·143 citations·filing 1978–2020
87Inventor score
Top patents by PatentIndex Score
11 records- 0189US6670278B2Method of plasma etching of silicon carbideLAM RES CORP·Filed 2001·Granted Dec 30, 2003·54 cites·22 claims
- 0281US10037890B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2016·Granted Jul 31, 2018·3 cites·18 claims
- 0378US4217956AMethod of in-situ recovery of viscous oils or bitumen utilizing a thermal recovery fluid and carbon dioxideTEXACO CANADA INC·Filed 1978·Granted Aug 19, 1980·50 cites·13 claims
- 0475US9972502B2Systems and methods for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2015·Granted May 15, 2018·2 cites·9 claims
- 0575US6841483B2Unique process chemistry for etching organic low-k materialsLAM RES CORP·Filed 2001·Granted Jan 11, 2005·19 cites·13 claims
- 0660US7476610B2Removable spacerLAM RES CORP·Filed 2006·Granted Jan 13, 2009·1 cites·19 claims
- 0756US4233840AMethod for evaluation of the response of different cores to a recovery process and apparatus thereforTEXACO CANADA INC·Filed 1979·Granted Nov 18, 1980·14 cites·13 claims
- 0853US10541141B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 0951US12237175B2Polymerization protective liner for reactive ion etch in patterningLAM RES CORP·Filed 2020·Granted Feb 25, 2025·0 cites·20 claims
- 1049US2018247828A1Systems for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2018·Application pending·0 cites
- 1139US10002773B2Method for selectively etching silicon oxide with respect to an organic maskLAM RES CORP·Filed 2016·Granted Jun 19, 2018·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →