Inventor · disambiguated record
Mitsuhiro Hirano
Also filed as: HIRANO MITSUHIRO
10 granted patents·3 pending applications·582 citations·filing 1993–2015
90Inventor score
Files withKOKUSAI ELECTRIC CO LTD5FUJITSU MICROELECTRONICS LTD1FUJITSU SEMICONDUCTOR LTD1HITACHI INT ELECTRIC INC1HITACHI LTD1
Top patents by PatentIndex Score
13 records- 0195US9111972B2Substrate processing apparatus and manufacturing method for a semiconductor deviceTAKESHITA MITSUNORI·Filed 2005·Granted Aug 18, 2015·443 cites·17 claims
- 0281US6264706B1Substrate processing apparatus with local exhaust for removing contaminantsKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Jul 24, 2001·25 cites·18 claims
- 0377US7516383B2Method and apparatus for analyzing delay in circuit, and computer productFUJITSU MICROELECTRONICS LTD·Filed 2006·Granted Apr 7, 2009·9 cites·20 claims
- 0475US5810538ASemiconductor manufacturing equipment and method for carrying wafers in said equipmentKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Sep 22, 1998·50 cites·12 claims
- 0573US7660753B2Inventory control system, inventory control method, fee collection method utilized in inventory control system, inventory control program, and storage mediumHITACHI LTD·Filed 2003·Granted Feb 9, 2010·8 cites·2 claims
- 0663US10604839B2Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrateHITACHI INT ELECTRIC INC·Filed 2015·Granted Mar 31, 2020·1 cites·8 claims
- 0759US6332898B1Substrate processing apparatus and maintenance method thereforKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Dec 25, 2001·6 cites·25 claims
- 0854US2002111914A1Method for specifying product delivery destinationsFiled 2002·Application pending·0 cites
- 0953US5277215AMethod for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the sameKOKUSAI ELECTRIC CO LTD·Filed 1993·Granted Jan 11, 1994·27 cites·16 claims
- 1049US6143040ASubstrate processing apparatus and maintenance method thereforKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Nov 7, 2000·13 cites·23 claims
- 1140US8816759B2Electric circuit and semiconductor deviceFUJITSU SEMICONDUCTOR LTD·Filed 2013·Granted Aug 26, 2014·0 cites·8 claims
- 1239US2002034305A1Method and system for issuing service and method and system for providing serviceFiled 2001·Application pending·0 cites
- 1328US2002104206A1Substrate processing apparatusFiled 1997·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →