Inventor · disambiguated record
Michael C. Kellogg
Also filed as: KELLOGG MICHAEL · KELLOGG MICHAEL C
40 granted patents·12 pending applications·1,579 citations·filing 2008–2024
98Inventor score
Top patents by PatentIndex Score
52 records- 0198US10115568B2Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ringLAM RES CORP·Filed 2017·Granted Oct 30, 2018·57 cites·26 claims
- 0298US9852889B1Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ringLAM RES CORP·Filed 2016·Granted Dec 26, 2017·135 cites·21 claims
- 0398US8573152B2Showerhead electrodeDE LA LLERA ANTHONY·Filed 2010·Granted Nov 5, 2013·595 cites·17 claims
- 0498US8206506B2Showerhead electrodeKADKHODAYAN BABAK·Filed 2008·Granted Jun 26, 2012·434 cites·13 claims
- 0597US8221582B2Clamped monolithic showerhead electrodePATRICK ROGER·Filed 2008·Granted Jul 17, 2012·67 cites·14 claims
- 0697US8161906B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2008·Granted Apr 24, 2012·49 cites·17 claims
- 0796US10283330B2Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generatorsLAM RES CORP·Filed 2017·Granted May 7, 2019·14 cites·19 claims
- 0896US8485128B2Movable ground ring for a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Jul 16, 2013·38 cites·20 claims
- 0995US10615003B2Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ringLAM RES CORP·Filed 2018·Granted Apr 7, 2020·9 cites·20 claims
- 1095US8900398B2Local plasma confinement and pressure control arrangement and methods thereofDHINDSA RAJINDER·Filed 2010·Granted Dec 2, 2014·27 cites·14 claims
- 1194US9502275B1Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2015·Granted Nov 22, 2016·13 cites·17 claims
- 1294US9123661B2Silicon containing confinement ring for plasma processing apparatus and method of forming thereofLAM RES CORP·Filed 2013·Granted Sep 1, 2015·15 cites·14 claims
- 1393US11195706B2Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generatorsLAM RES CORP·Filed 2019·Granted Dec 7, 2021·7 cites·21 claims
- 1493US8313805B2Clamped showerhead electrode assemblyKADKHODAYAN BABAK·Filed 2012·Granted Nov 20, 2012·16 cites·10 claims
- 1592US11393705B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2020·Granted Jul 19, 2022·2 cites·16 claims
- 1692US8826855B2C-shaped confinement ring for a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Sep 9, 2014·16 cites·15 claims
- 1792US8414719B2Clamped monolithic showerhead electrodePATRICK ROGER·Filed 2012·Granted Apr 9, 2013·13 cites·6 claims
- 1891US10825656B2Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ringLAM RES CORP·Filed 2020·Granted Nov 3, 2020·2 cites·20 claims
- 1991US10557197B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2015·Granted Feb 11, 2020·4 cites·19 claims
- 2091US10118263B2Monolithic manifold mask and substrate conceptsLAM RES CORP·Filed 2015·Granted Nov 6, 2018·11 cites·13 claims
- 2189US8796153B2Clamped monolithic showerhead electrodeLAM RES CORP·Filed 2013·Granted Aug 5, 2014·7 cites·9 claims
- 2287US10049862B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2016·Granted Aug 14, 2018·4 cites·25 claims
- 2387US8470127B2Cam-locked showerhead electrode and assemblyDE LA LLERA ANTHONY·Filed 2011·Granted Jun 25, 2013·11 cites·9 claims
- 2485US8469368B2Edge rings for electrostatic chucksKENWORTHY IAN JARED·Filed 2009·Granted Jun 25, 2013·16 cites·30 claims
- 2579US10037869B2Plasma processing devices having multi-port valve assembliesLAM RES CORP·Filed 2015·Granted Jul 31, 2018·2 cites·22 claims
- 2678US11764086B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2022·Granted Sep 19, 2023·0 cites·18 claims
- 2777US10790174B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2018·Granted Sep 29, 2020·1 cites·10 claims
- 2877US10665435B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2019·Granted May 26, 2020·1 cites·20 claims
- 2977US2024266151A1Ring structures and systems for use in a plasma chamberLAM RES CORP·Filed 2024·Application pending·0 cites
- 3076US2024162015A1Ring structures and systems for use in a plasma chamberLAM RES CORP·Filed 2024·Application pending·0 cites
- 3175US10395902B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2018·Granted Aug 27, 2019·1 cites·27 claims
- 3274US10914003B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2019·Granted Feb 9, 2021·0 cites·16 claims
- 3371US8847495B2Movable grounding arrangements in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Sep 30, 2014·2 cites·15 claims
- 3470US9929028B2Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2016·Granted Mar 27, 2018·1 cites·20 claims
- 3570US8975817B2Pressure controlled heat pipe temperature control plateLAM RES CORP·Filed 2012·Granted Mar 10, 2015·2 cites·20 claims
- 3670US8845856B2Edge ring assembly for plasma etching chambersKANG MICHAEL S·Filed 2010·Granted Sep 30, 2014·3 cites·6 claims
- 3766US11227749B23D printed plasma arrestor for an electrostatic chuckLAM RES CORP·Filed 2016·Granted Jan 18, 2022·1 cites·9 claims
- 3864US9171702B2Consumable isolation ring for movable substrate support assembly of a plasma processing chamberKELLOGG MICHAEL C·Filed 2010·Granted Oct 27, 2015·1 cites·5 claims
- 3964US8628268B2Cam lock electrode clampKELLOGG MICHAEL C·Filed 2009·Granted Jan 14, 2014·2 cites·20 claims
- 4058US12100575B2Plasma processing devices having multi-port valve assembliesLAM RES CORP·Filed 2018·Granted Sep 24, 2024·0 cites·30 claims
- 4156US2016111257A1Substrate for mounting gas supply components and methods thereofLAM RES CORP·Filed 2014·Application pending·0 cites
- 4255US10014196B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2015·Granted Jul 3, 2018·0 cites·6 claims
- 4354US2024234104A1Multi-sectional plasma confinement ring structureLAM RES CORP·Filed 2022·Application pending·0 cites
- 4454US2014367047A1Edge ring assembly for plasma etching chambersLAM RES CORP·Filed 2014·Application pending·0 cites
- 4554US2020365378A1Ring Structures and Systems for Use in a Plasma ChamberLAM RES CORP·Filed 2017·Application pending·0 cites
- 4647US2016050781A1Movable ground ring for movable substrate support assembly of a plasma processing chamberLAM RES CORP·Filed 2015·Application pending·0 cites
- 4747US2015364322A1Silicon containing confinement ring for plasma processing apparatus and method of forming thereofLAM RES CORP·Filed 2015·Application pending·0 cites
- 4845US9111731B2Gas feed insert in a plasma processing chamber and methods thereforDE LA LLERA ANTHONY·Filed 2012·Granted Aug 18, 2015·0 cites·21 claims
- 4945US2015041062A1Plasma processing chamber with removable bodyLAM RES CORP·Filed 2013·Application pending·0 cites
- 5044US2015047785A1Plasma Processing Devices Having Multi-Port Valve AssembliesLAM RES CORP·Filed 2013·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →