Inventor · disambiguated record
Michael D. Kilgore
Also filed as: KILGORE MICHAEL · KILGORE MICHAEL D
3 granted patents·1 pending application·215 citations·filing 1996–2009
75Inventor score
Technology areasH10P
Files withNOVELLUS SYSTEMS INC4
Top patents by PatentIndex Score
4 records- 0191US6200412B1Chemical vapor deposition system including dedicated cleaning gas injectionNOVELLUS SYSTEMS INC·Filed 1996·Granted Mar 13, 2001·181 cites·16 claims
- 0289US7558045B1Electrostatic chuck assembly with capacitive sense feature, and related operating methodNOVELLUS SYSTEMS INC·Filed 2008·Granted Jul 7, 2009·28 cites·30 claims
- 0354US7144822B1High density plasma process for optimum film quality and electrical resultsNOVELLUS SYSTEMS INC·Filed 2002·Granted Dec 5, 2006·6 cites·19 claims
- 0449US2010008016A1Electrostatic chuck assembly with capacitive sense feature, and related operating methodNOVELLUS SYSTEMS INC·Filed 2009·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Michael D. Kilgore files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →