Inventor · disambiguated record
Michael Philip Kincaid
Also filed as: KINCAID MICHAEL · KINCAID MICHAEL PHILIP
2 granted patents·6 citations·filing 2006–2007
51Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0169US7671412B2Method and device for controlling temperature of a substrate using an internal temperature control deviceTOKYO ELECTRON LTD·Filed 2007·Granted Mar 2, 2010·4 cites·43 claims
- 0263US7478014B2Method and system for facilitating preventive maintenance of an optical inspection toolTOKYO ELECTRON LTD·Filed 2006·Granted Jan 13, 2009·2 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →