Inventor · disambiguated record
Michael E. Kling
Also filed as: KLING MICHAEL E
7 granted patents·594 citations·filing 1997–2001
90Inventor score
Top patents by PatentIndex Score
7 records- 0197US5900340AOne dimensional lithographic proximity correction using DRC shape functionsMOTOROLA INC·Filed 1997·Granted May 4, 1999·269 cites·14 claims
- 0291US6566019B2Using double exposure effects during phase shifting to control line end shorteningNUMERICAL TECH INC·Filed 2001·Granted May 20, 2003·46 cites·31 claims
- 0391US5849440AProcess for producing and inspecting a lithographic reticle and fabricating semiconductor devices using sameMOTOROLA INC·Filed 1997·Granted Dec 15, 1998·94 cites·18 claims
- 0487US5920487ATwo dimensional lithographic proximity correction using DRC shape functionsMOTOROLA INC·Filed 1997·Granted Jul 6, 1999·70 cites·20 claims
- 0579US5958635ALithographic proximity correction through subset feature modificationMOTOROLA INC·Filed 1997·Granted Sep 28, 1999·62 cites·21 claims
- 0679US5827625AMethods of designing a reticle and forming a semiconductor device therewithMOTOROLA INC·Filed 1997·Granted Oct 27, 1998·45 cites·34 claims
- 0765US6573010B2Method and apparatus for reducing incidental exposure by using a phase shifter with a variable regulatorNUMERICAL TECH INC·Filed 2001·Granted Jun 3, 2003·8 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →