Inventor · disambiguated record
Mitsunori Komatsu
Also filed as: KOMATSU MITSUNORI
12 granted patents·1 pending application·136 citations·filing 1999–2021
89Inventor score
Files withEBARA CORP13
Top patents by PatentIndex Score
13 records- 0190US10414018B2Apparatus and method for regulating surface temperature of polishing padEBARA CORP·Filed 2017·Granted Sep 17, 2019·4 cites·15 claims
- 0289US6338671B1Apparatus for supplying polishing liquidEBARA CORP·Filed 2000·Granted Jan 15, 2002·41 cites·27 claims
- 0386US6443816B2Method and apparatus for cleaning polishing surface of polisherEBARA CORP·Filed 2001·Granted Sep 3, 2002·32 cites·9 claims
- 0483US10903101B2Substrate processing apparatus and method for detecting abnormality of substrateEBARA CORP·Filed 2016·Granted Jan 26, 2021·6 cites·18 claims
- 0569US6758728B2Method and apparatus for cleaning polishing surface of polisherEBARA CORP·Filed 2002·Granted Jul 6, 2004·10 cites·3 claims
- 0667US6508695B2Pure water reusing systemEBARA CORP·Filed 2001·Granted Jan 21, 2003·12 cites·10 claims
- 0765US6280300B1Filter apparatusEBARA CORP·Filed 1999·Granted Aug 28, 2001·31 cites·19 claims
- 0863US11898940B2Leak detection system and inspection method for the systemEBARA CORP·Filed 2021·Granted Feb 13, 2024·0 cites·10 claims
- 0957US12472601B2Method of checking leakage of fluid and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 18, 2025·0 cites·7 claims
- 1050US11992915B2System for adjusting pad surface temperature and polishing apparatusEBARA CORP·Filed 2020·Granted May 28, 2024·0 cites·13 claims
- 1145US9373528B2Substrate processing apparatusEBARA CORP·Filed 2014·Granted Jun 21, 2016·0 cites·10 claims
- 1243US10373845B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted Aug 6, 2019·0 cites·5 claims
- 1337US2019308293A1Method of regulating a surface temperature of polishing pad, and polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mitsunori Komatsu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →