Inventor · disambiguated record
Michio Kono
Also filed as: KONO MICHIO
10 granted patents·1 pending application·16 citations·filing 2006–2022
81Inventor score
Top patents by PatentIndex Score
11 records- 0190US11448969B2Illumination optical system, exposure apparatus, and article manufacturing methodCANON KK·Filed 2020·Granted Sep 20, 2022·3 cites·15 claims
- 0281US7864296B2Exposure apparatus, setting method, and exposure method having the sameCANON KK·Filed 2006·Granted Jan 4, 2011·11 cites·13 claims
- 0372US10067325B2Projection optical system, exposure apparatus, and article manufacturing methodCANON KK·Filed 2017·Granted Sep 4, 2018·2 cites·17 claims
- 0471US2022390853A1Illumination optical system, exposure apparatus, and article manufacturing methodCANON KK·Filed 2022·Application pending·0 cites
- 0557US10921717B2Exposure apparatus and article manufacturing methodCANON KK·Filed 2020·Granted Feb 16, 2021·0 cites·17 claims
- 0653US10578846B2Projection optical system, exposure apparatus, and article manufacturing methodCANON KK·Filed 2018·Granted Mar 3, 2020·0 cites·33 claims
- 0752US11215930B2Exposure apparatus, and article manufacturing methodCANON KK·Filed 2020·Granted Jan 4, 2022·0 cites·19 claims
- 0852US11099488B2Exposure apparatus and article manufacturing methodCANON KK·Filed 2020·Granted Aug 24, 2021·0 cites·12 claims
- 0948US11966043B2Imaging optical system, exposure apparatus, and article manufacturing methodCANON KK·Filed 2021·Granted Apr 23, 2024·0 cites·9 claims
- 1041US8294874B2Exposure apparatusKONO MICHIO·Filed 2009·Granted Oct 23, 2012·0 cites·14 claims
- 1141US8174679B2Illumination optical system, exposure apparatus, and device fabrication methodKONO MICHIO·Filed 2009·Granted May 8, 2012·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →