Inventor · disambiguated record
Ming-Shu Kuo
Also filed as: KUO MING-SHU
2 granted patents·3 pending applications·2 citations·filing 2012–2015
34Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0158US8999184B2Method for providing viasKUO MING-SHU·Filed 2012·Granted Apr 7, 2015·2 cites·13 claims
- 0238US9385003B1Residue free systems and methods for isotropically etching silicon in tight spacesLAM RES CORP·Filed 2015·Granted Jul 5, 2016·0 cites·10 claims
- 0338US2014179106A1In-situ metal residue cleanLAM RES CORP·Filed 2012·Application pending·0 cites
- 0436US2014051256A1Etch with mixed mode pulsingZHONG QINGHUA·Filed 2012·Application pending·0 cites
- 0532US2014030893A1Method for shrink and tune trench/via cdKUO MING-SHU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →