Inventor · disambiguated record
Michael Lill
Also filed as: LILL MICHAEL
4 granted patents·2 pending applications·105 citations·filing 1997–2016
77Inventor score
Top patents by PatentIndex Score
6 records- 0193US7460206B2Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2004·Granted Dec 2, 2008·71 cites·3 claims
- 0282US8279402B2Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the sameSIX STEPHAN·Filed 2009·Granted Oct 2, 2012·11 cites·27 claims
- 0366US6227709B1Bearing shell with retaining cam and method for production thereofGLYCO METALL WERKE·Filed 1997·Granted May 8, 2001·23 cites·7 claims
- 0454US2008297745A1Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0554US2008291419A1Projection objective for immersion lithographyZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0651US10330237B2Pipe lining material for use for at least two predefined pipeline nominal widthsBRAUN KARL OTTO GMBH & CO KG·Filed 2016·Granted Jun 25, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →