Inventor · disambiguated record
Michael Malinowski
Also filed as: MALINOWSKI MICHAEL E
2 granted patents·1 pending application·11 citations·filing 2001–2002
49Inventor score
Files withEUV LLC2
Top patents by PatentIndex Score
3 records- 0153US6847463B2Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfacesEUV LLC·Filed 2002·Granted Jan 25, 2005·11 cites·27 claims
- 0234US6734422B2Portable outgas detection apparatusEUV LLC·Filed 2001·Granted May 11, 2004·0 cites·12 claims
- 0325US2003064161A1Method for reducing carbon contamination of multilayer mirrorsFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →