Inventor · disambiguated record
Mihail Mihaylov
Also filed as: MIHAYLOV MIHAIL · MIHAYLOV MIHAIL D
15 granted patents·5 pending applications·107 citations·filing 2002–2023
92Inventor score
Top patents by PatentIndex Score
20 records- 0192US10473525B2Spatially resolved optical emission spectroscopy (OES) in plasma processingTOKYO ELECTRON LTD·Filed 2017·Granted Nov 12, 2019·6 cites·20 claims
- 0292US7595869B1Optical metrology system optimized with a plurality of design goalsTOKYO ELECTRON LTD·Filed 2008·Granted Sep 29, 2009·24 cites·20 claims
- 0389US7761178B2Automated process control using an optical metrology system optimized with design goalsTOKYO ELECTRON LTD·Filed 2008·Granted Jul 20, 2010·16 cites·23 claims
- 0486US10692705B2Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamberTOKYO ELECTRON LTD·Filed 2016·Granted Jun 23, 2020·5 cites·23 claims
- 0584US9970818B2Spatially resolved optical emission spectroscopy (OES) in plasma processingTOKYO ELECTRON LTD·Filed 2014·Granted May 15, 2018·5 cites·19 claims
- 0682US10416430B2Focusing of optical devicesAPPLEJACK 199 LP·Filed 2017·Granted Sep 17, 2019·3 cites·25 claims
- 0780US9059038B2System for in-situ film stack measurement during etching and etch control methodTOKYO ELECTRON LTD·Filed 2013·Granted Jun 16, 2015·5 cites·10 claims
- 0880US7761250B2Optical metrology system optimized with design goalsTOKYO ELECTRON LTD·Filed 2008·Granted Jul 20, 2010·12 cites·18 claims
- 0975US6867870B1Digital detector data communication in an optical metrology toolTHERMA WAVE INC·Filed 2002·Granted Mar 15, 2005·23 cites·17 claims
- 1070US9846088B2Differential acoustic time of flight measurement of temperature of semiconductor substratesTOKYO ELECTRON LTD·Filed 2014·Granted Dec 19, 2017·2 cites·20 claims
- 1167US10837902B2Optical sensor for phase determinationTOKYO ELECTRON LTD·Filed 2018·Granted Nov 17, 2020·1 cites·20 claims
- 1262US7595471B1Auto focusing of a workpiece using an array detector each with a detector identificationTOKYO ELECTRON LTD·Filed 2008·Granted Sep 29, 2009·3 cites·18 claims
- 1361US11163144B2Focusing of optical devicesAPPLEJACK 199 LP·Filed 2021·Granted Nov 2, 2021·0 cites·20 claims
- 1461US10935777B2Focusing of optical devicesAPPLEJACK 199 LP·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 1559US2025157801A1Sub-millisecond optical detection of pulsed plasma processesTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1658US7789541B2Method and system for lamp temperature control in optical metrologyTOKYO ELECTRON LTD·Filed 2008·Granted Sep 7, 2010·2 cites·16 claims
- 1754US2025112065A1Metrology integrated with vacuum processingTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1854US2024339309A1Advanced OES CharacterizationTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1944US2010118316A1Auto focus array detector optimized for operating objectivesTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 2037US2018286643A1Advanced optical sensor, system, and methodologies for etch processing monitoringTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →