Inventor · disambiguated record
Min-Yeong Moon
Also filed as: MOON MIN-YEONG
7 granted patents·2 pending applications·7 citations·filing 2020–2024
75Inventor score
Files withKLA CORP9
Top patents by PatentIndex Score
9 records- 0193US11604420B2Self-calibrating overlay metrologyKLA CORP·Filed 2021·Granted Mar 14, 2023·2 cites·44 claims
- 0290US12181271B2Estimating in-die overlay with tool induced shift correctionKLA CORP·Filed 2022·Granted Dec 31, 2024·2 cites·22 claims
- 0385US11530913B2Methods and systems for determining quality of semiconductor measurementsKLA CORP·Filed 2020·Granted Dec 20, 2022·2 cites·20 claims
- 0481US11604063B2Self-calibrated overlay metrology using a skew training sampleKLA CORP·Filed 2021·Granted Mar 14, 2023·1 cites·26 claims
- 0576US11880142B2Self-calibrating overlay metrologyKLA CORP·Filed 2023·Granted Jan 23, 2024·0 cites·34 claims
- 0660US2024353759A1Full Wafer Measurement Based On A Trained Full Wafer Measurement ModelKLA CORP·Filed 2023·Application pending·0 cites
- 0753US12209854B2Methods and systems for measurement of tilt and overlay of a structureKLA CORP·Filed 2022·Granted Jan 28, 2025·0 cites·18 claims
- 0851US2025259051A1Machine learning libraries for recipe setupKLA CORP·Filed 2024·Application pending·0 cites
- 0946US12148639B2Correcting target locations for temperature in semiconductor applicationsKLA CORP·Filed 2022·Granted Nov 19, 2024·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →