Inventor · disambiguated record
Michael P. Nault
Also filed as: NAULT MICHAEL P
10 granted patents·930 citations·filing 1997–2003
93Inventor score
Top patents by PatentIndex Score
10 records- 0197US6583071B1Ultrasonic spray coating of liquid precursor for low K dielectric coatingsAPPLIED MATERIALS INC·Filed 2000·Granted Jun 24, 2003·146 cites·14 claims
- 0295US6190233B1Method and apparatus for improving gap-fill capability using chemical and physical etchbacksAPPLIED MATERIALS INC·Filed 1998·Granted Feb 20, 2001·277 cites·11 claims
- 0395US5990000AMethod and apparatus for improving gap-fill capability using chemical and physical etchbacksAPPLIED MATERIALS INC·Filed 1997·Granted Nov 23, 1999·270 cites·14 claims
- 0492US6875687B1Capping layer for extreme low dielectric constant filmsAPPLIED MATERIALS INC·Filed 2000·Granted Apr 5, 2005·113 cites·54 claims
- 0589US6592980B1Mesoporous films having reduced dielectric constantsAIR PROD & CHEM·Filed 2000·Granted Jul 15, 2003·39 cites·6 claims
- 0685US6576568B2Ionic additives for extreme low dielectric constant chemical formulationsAPPLIED MATERIALS INC·Filed 2001·Granted Jun 10, 2003·29 cites·15 claims
- 0778US6843881B2Detecting chemiluminescent radiation in the cleaning of a substrate processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Jan 18, 2005·17 cites·15 claims
- 0877US6818289B2Mesoporous films having reduced dielectric constantsAIR PROD & CHEM·Filed 2002·Granted Nov 16, 2004·17 cites·11 claims
- 0975US6896955B2Ionic additives for extreme low dielectric constant chemical formulationsAPPLIED MATERIALS INC·Filed 2002·Granted May 24, 2005·16 cites·20 claims
- 1058US7265062B2Ionic additives for extreme low dielectric constant chemical formulationsAIR PROD & CHEM·Filed 2003·Granted Sep 4, 2007·6 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →