Inventor · disambiguated record
Minoru Obata
Also filed as: OBATA MINORU
13 granted patents·3 pending applications·297 citations·filing 1990–2020
92Inventor score
Top patents by PatentIndex Score
16 records- 0192US5418071ASputtering target and method of manufacturing the sameTOSHIBA KK·Filed 1993·Granted May 23, 1995·67 cites·21 claims
- 0288US7751921B2Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the methodTOKYO ELECTRON LTD·Filed 2005·Granted Jul 6, 2010·15 cites·9 claims
- 0383US5470527ATi-W sputtering target and method for manufacturing sameTOSHIBA KK·Filed 1994·Granted Nov 28, 1995·53 cites·14 claims
- 0480US5196916AHighly purified metal material and sputtering target using the sameTOSHIBA KK·Filed 1991·Granted Mar 23, 1993·54 cites·36 claims
- 0578US5184888AIlluminating portion of vanity mirrorKOITO MFG CO LTD·Filed 1990·Granted Feb 9, 1993·51 cites·2 claims
- 0669US7974729B2Server device and program with sub-recipe measurement communicationTOKYO ELECTRON LTD·Filed 2007·Granted Jul 5, 2011·3 cites·15 claims
- 0765US5458697AHighly purified metal material and sputtering target using the sameTOSHIBA KK·Filed 1994·Granted Oct 17, 1995·28 cites·23 claims
- 0863US5679983AHighly purified metal material and sputtering target using the sameTOSHIBA KK·Filed 1995·Granted Oct 21, 1997·22 cites·3 claims
- 0962US8121799B2Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wireTERASAWA NOBUTOSHI·Filed 2008·Granted Feb 21, 2012·4 cites·10 claims
- 1057US11732332B2Nickel-base alloy welding material, welding material for nuclear reactor, nuclear power apparatus and nuclear power structure, and method of repairing nuclear power apparatus and nuclear power structureTOSHIBA KK·Filed 2020·Granted Aug 22, 2023·0 cites·8 claims
- 1152US2012169505A1Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wireTERASAWA NOBUTOSHI·Filed 2012·Application pending·0 cites
- 1251US7869888B2Information processing apparatus, semiconductor manufacturing system, information processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Jan 11, 2011·0 cites·22 claims
- 1345US8055391B2Server device and programTOKYO ELECTRON LTD·Filed 2007·Granted Nov 8, 2011·0 cites·21 claims
- 1445US2011035165A1Information processing apparatus, semiconductor manufacturing system, information processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1545US2009110824A1Substrate processing apparatus and method of controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1643US9562285B2Film forming method, film forming apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Feb 7, 2017·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →