Inventor · disambiguated record
Michael J. M. Renkens
Also filed as: RENKENS MICHAEL J M · RENKENS MICHAEL JOZEFA MATHIJS
12 granted patents·923 citations·filing 2000–2006
93Inventor score
Files withASML NETHERLANDS BV12
Top patents by PatentIndex Score
12 records- 0198US6603130B1Gas bearings for use with vacuum chambers and their application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2000·Granted Aug 5, 2003·733 cites·25 claims
- 0293US6618122B2Movable support in a vacuum chamber and its application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2002·Granted Sep 9, 2003·33 cites·20 claims
- 0392US6445440B1Motion feed-through into a vacuum chamber and its application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2000·Granted Sep 3, 2002·52 cites·17 claims
- 0488US6740891B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted May 25, 2004·26 cites·11 claims
- 0586US6421112B1Movable support in a vacuum chamber and its application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2000·Granted Jul 16, 2002·26 cites·28 claims
- 0683US6597433B1Multi-stage drive arrangements and their application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2000·Granted Jul 22, 2003·23 cites·16 claims
- 0771US7049592B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 23, 2006·10 cites·16 claims
- 0870US6844922B2Gas bearings for use with vacuum chambers and their application in lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Jan 18, 2005·11 cites·22 claims
- 0954US6816238B2Motion feed-through into a vacuum chamber and its application in lithographic projection apparatusesASML NETHERLANDS BV·Filed 2002·Granted Nov 9, 2004·3 cites·24 claims
- 1053US7397040B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Jul 8, 2008·0 cites·19 claims
- 1153US7084953B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Aug 1, 2006·2 cites·19 claims
- 1252US6597431B2Lithographic projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2001·Granted Jul 22, 2003·4 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →