Inventor · disambiguated record
Michael R. Rice
Also filed as: RICE MICHAEL · RICE MICHAEL R · RICE MICHAEL ROBERT
217 granted patents·68 pending applications·7,310 citations·filing 1989–2025
99Inventor score
Files withAPPLIED MATERIALS INC235INTELLICALL INC11ISHIKAWA TETSUYA5APPLIED MATERIAL INC3APPLIED MATERIALS ISRAEL LTD3
Top patents by PatentIndex Score
285 records- 0198US11581203B2Systems for integrating load locks into a factory interface footprint spaceAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·7 cites·14 claims
- 0298US11049740B1Reconfigurable mainframe with replaceable interface plateAPPLIED MATERIALS INC·Filed 2020·Granted Jun 29, 2021·4 cites·20 claims
- 0398US10312056B2Distributed electrode array for plasma processingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 4, 2019·39 cites·20 claims
- 0498US7925377B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 12, 2011·45 cites·3 claims
- 0598US7743728B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·36 cites·16 claims
- 0698US7694647B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·42 cites·19 claims
- 0798US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0898US6573030B1Method for depositing an amorphous carbon layerAPPLIED MATERIALS INC·Filed 2000·Granted Jun 3, 2003·1.3k cites·129 claims
- 0998US6054013AParallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion densityAPPLIED MATERIALS INC·Filed 1996·Granted Apr 25, 2000·596 cites·19 claims
- 1097US7409263B2Methods and apparatus for repositioning support for a substrate carrierAPPLIED MATERIALS INC·Filed 2005·Granted Aug 5, 2008·44 cites·16 claims
- 1197US7359767B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2006·Granted Apr 15, 2008·33 cites·25 claims
- 1296US10443125B2Flourination process to create sacrificial oxy-flouride layerAPPLIED MATERIALS INC·Filed 2018·Granted Oct 15, 2019·6 cites·18 claims
- 1396US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 1496US7346431B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyerAPPLIED MATERIALS INC·Filed 2006·Granted Mar 18, 2008·27 cites·23 claims
- 1596US7234584B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2003·Granted Jun 26, 2007·86 cites·23 claims
- 1696US6095083AVacuum processing chamber having multi-mode accessAPPLIED MATERIELS INC·Filed 1997·Granted Aug 1, 2000·534 cites·42 claims
- 1796US6077384APlasma reactor having an inductive antenna coupling power through a parallel plate electrodeAPPLIED MATERIALS INC·Filed 1996·Granted Jun 20, 2000·237 cites·67 claims
- 1896US6074512AInductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet linersAPPLIED MATERIALS INC·Filed 1997·Granted Jun 13, 2000·236 cites·101 claims
- 1995US11332827B2Gas distribution plate with high aspect ratio holes and a high hole densityAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·3 cites·20 claims
- 2095US10763134B2Substrate processing apparatus and methods with factory interface chamber filter purgeAPPLIED MATERIALS INC·Filed 2018·Granted Sep 1, 2020·9 cites·27 claims
- 2195US10388547B2Side storage pods, equipment front end modules, and methods for processing substratesAPPLIED MATERIALS INC·Filed 2017·Granted Aug 20, 2019·14 cites·19 claims
- 2295US10359743B2Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controlsAPPLIED MATERIALS INC·Filed 2015·Granted Jul 23, 2019·10 cites·23 claims
- 2395US8550031B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Granted Oct 8, 2013·13 cites·10 claims
- 2495US7819079B2Cartesian cluster tool configuration for lithography type processesAPPLIED MATERIALS INC·Filed 2006·Granted Oct 26, 2010·26 cites·11 claims
- 2595US7792608B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2007·Granted Sep 7, 2010·21 cites·20 claims
- 2695US7335462B2Method of depositing an amorphous carbon layerAPPLIED MATERIALS INC·Filed 2007·Granted Feb 26, 2008·24 cites·20 claims
- 2795US7243003B2Substrate carrier handler that unloads substrate carriers directly from a moving conveyorAPPLIED MATERIALS INC·Filed 2003·Granted Jul 10, 2007·65 cites·90 claims
- 2895US6955197B2Substrate carrier having door latching and substrate clamping mechanismsAPPLIED MATERIALS INC·Filed 2003·Granted Oct 18, 2005·73 cites·26 claims
- 2995US6841341B2Method of depositing an amorphous carbon layerAPPLIED MATERIALS INC·Filed 2002·Granted Jan 11, 2005·78 cites·19 claims
- 3095US6623596B1Plasma reactor having an inductive antenna coupling power through a parallel plate electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Sep 23, 2003·84 cites·136 claims
- 3195US5477975APlasma etch apparatus with heated scavenging surfacesAPPLIED MATERIALS INC·Filed 1993·Granted Dec 26, 1995·86 cites·49 claims
- 3294US11110425B2Gas distribution plate for thermal depositionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·4 cites·20 claims
- 3394US9405287B1Apparatus and method for optical calibration of wafer placement by a robotAPPLIED MATERIALS INC·Filed 2015·Granted Aug 2, 2016·11 cites·20 claims
- 3494US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 3594US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 3694US7720655B2Extended mainframe designs for semiconductor device manufacturing equipmentAPPLIED MATERIALS INC·Filed 2006·Granted May 18, 2010·25 cites·22 claims
- 3794US7527141B2System for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2006·Granted May 5, 2009·20 cites·20 claims
- 3894US7299831B2Substrate carrier having door latching and substrate clamping mechanismsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 27, 2007·20 cites·8 claims
- 3994US7077264B2Methods and apparatus for transporting substrate carriersAPPLIED MATERIAL INC·Filed 2004·Granted Jul 18, 2006·51 cites·37 claims
- 4094US7039501B2Method for determining a position of a robotAPPLIED MATERIALS INC·Filed 2003·Granted May 2, 2006·95 cites·47 claims
- 4194US6797189B2Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbonFiled 1999·Granted Sep 28, 2004·217 cites·29 claims
- 4293US11393710B2Wafer edge ring lifting solutionAPPLIED MATERIALS INC·Filed 2017·Granted Jul 19, 2022·9 cites·15 claims
- 4393US11114284B2Plasma reactor with electrode array in ceilingAPPLIED MATERIALS INC·Filed 2017·Granted Sep 7, 2021·4 cites·18 claims
- 4493US10443126B1Zone-controlled rare-earth oxide ALD and CVD coatingsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 15, 2019·7 cites·15 claims
- 4593US9831111B2Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuckAPPLIED MATERIALS INC·Filed 2014·Granted Nov 28, 2017·13 cites·20 claims
- 4693US7293642B2Methods and apparatus for transporting substrate carriersAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·16 cites·31 claims
- 4793US7223526B2Method of depositing an amorphous carbon layerAPPLIED MATERIALS INC·Filed 2004·Granted May 29, 2007·50 cites·20 claims
- 4893US6444085B1Inductively coupled RF plasma reactor having an antenna adjacent a window electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Sep 3, 2002·54 cites·59 claims
- 4993US5980194AWafer position error detection and correction systemAPPLIED MATERIALS INC·Filed 1996·Granted Nov 9, 1999·232 cites·31 claims
- 5093US4933966AMethod and apparatus for performing an automated collect callINTELLICALL INC·Filed 1989·Granted Jun 12, 1990·119 cites·54 claims
Showing the top 50 of 285 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →