Inventor · disambiguated record
Michael Philip Roberts
Also filed as: ROBERTS MICHAEL PHILIP
9 granted patents·12 pending applications·4 citations·filing 2012–2025
77Inventor score
Top patents by PatentIndex Score
21 records- 0184US2025019825A1Pedestals for modulating film properties in atomic layer deposition (ald) substrate processing chambersLAM RES CORP·Filed 2024·Application pending·0 cites
- 0280US11535936B2Dual gas feed showerhead for depositionLAM RES CORP·Filed 2018·Granted Dec 27, 2022·1 cites·17 claims
- 0380US11236422B2Multi zone substrate support for ALD film property correction and tunabilityLAM RES CORP·Filed 2018·Granted Feb 1, 2022·3 cites·8 claims
- 0476US2025062150A1Electrostatic chuck with seal surfaceLAM RES CORP·Filed 2024·Application pending·0 cites
- 0575US2025121465A1Substrate processing aparatuses with rotating mechanisms including shafts with gas flow pathsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0674US2025279299A1Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supportsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0773US2023090368A1Dual Gas Feed Showerhead for DepositionLAM RES CORP·Filed 2022·Application pending·0 cites
- 0870US2024392443A1Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2024·Application pending·0 cites
- 0968US12110586B2Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambersLAM RES CORP·Filed 2020·Granted Oct 8, 2024·0 cites·13 claims
- 1064US2025171902A1Temperature control of a multi-zone pedestalLAM RES CORP·Filed 2025·Application pending·0 cites
- 1163US12209312B2Temperature control of a multi-zone pedestalLAM RES CORP·Filed 2020·Granted Jan 28, 2025·0 cites·23 claims
- 1260US12186851B2Use of vacuum during transfer of substratesLAM RES CORP·Filed 2020·Granted Jan 7, 2025·0 cites·23 claims
- 1358US12308264B2Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supportsLAM RES CORP·Filed 2020·Granted May 20, 2025·0 cites·7 claims
- 1456US12142509B2Electrostatic chuck with seal surfaceLAM RES CORP·Filed 2019·Granted Nov 12, 2024·0 cites·33 claims
- 1555US2022228263A1Independently adjustable flowpath conductance in multi-station semiconductor processingLAM RES CORP·Filed 2020·Application pending·0 cites
- 1654US12071689B2Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2020·Granted Aug 27, 2024·0 cites·22 claims
- 1753US2023009859A1Asymmetric purged block beneath wafer plane to manage non-uniformityLAM RES CORP·Filed 2020·Application pending·0 cites
- 1851US2025043421A1Valve systems for balancing gas flow to multiple stations of a substrate processing systemLAM RES CORP·Filed 2022·Application pending·0 cites
- 1944US12400880B2Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamberLAM RES CORP·Filed 2022·Granted Aug 26, 2025·0 cites·24 claims
- 2044US2022243323A1Use of rotation to correct for azimuthal non-uniformities in semiconductor substrate processingLAM RES CORP·Filed 2020·Application pending·0 cites
- 2126US2014100531A1Medical aspiration apparatusANKRUM JAMES ALLEN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →