Inventor · disambiguated record
Mitsuaki Sato
Also filed as: SATO MITSUAKI
6 granted patents·3 pending applications·50 citations·filing 1990–2021
82Inventor score
Top patents by PatentIndex Score
9 records- 0178US11664200B2Placing table, positioning method of edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 30, 2023·2 cites·11 claims
- 0267US5466277AStarting powder for producing sintered-aluminum alloy, method for producing sintered parts, and sintered aluminum alloySHOWA DENKO KK·Filed 1994·Granted Nov 14, 1995·18 cites·16 claims
- 0365US5176740AAluminum-alloy powder, sintered aluminum-alloy, and method for producing the sintered aluminum-alloySHOWA DENKO KK·Filed 1990·Granted Jan 5, 1993·12 cites·10 claims
- 0454US5304343AAluminum-alloy powder, sintered aluminum-alloy, and method for producing the sintered aluminum-alloySHOWA DENKO KK·Filed 1992·Granted Apr 19, 1994·9 cites·18 claims
- 0554US5292358ASintered aluminum-alloySHOWA DENKO KK·Filed 1992·Granted Mar 8, 1994·9 cites·45 claims
- 0653US11804400B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Oct 31, 2023·0 cites·9 claims
- 0747US2022157573A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0846US2021183685A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0942US2020144090A1Placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →