Inventor · disambiguated record
Mike Schlicker
Also filed as: SCHLICKER MIKE
2 granted patents·1 pending application·4 citations·filing 2007–2011
41Inventor score
Top patents by PatentIndex Score
3 records- 0164US8152595B2System and method for optical endpoint detection during CMP by using an across-substrate signalSCHLICKER MIKE·Filed 2009·Granted Apr 10, 2012·4 cites·24 claims
- 0241US2008242195A1Cmp system having an eddy current sensor of reduced heightHEINRICH JENS·Filed 2007·Application pending·0 cites
- 0327US9018023B2Detection of surface defects by optical inline metrology during Cu-CMP processSCHLICKER MIKE·Filed 2011·Granted Apr 28, 2015·0 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Mike Schlicker files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →