Inventor · disambiguated record
Mir Homayoun Shahrjerdy
Also filed as: SHAHRJERDY MIR HOMAYOUN
4 granted patents·7 citations·filing 2017–2024
68Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0195US11947269B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2021·Granted Apr 2, 2024·2 cites·20 claims
- 0288US10578982B2Substrate measurement recipe design of, or for, a target including a latent imageASML NETHERLANDS BV·Filed 2017·Granted Mar 3, 2020·4 cites·20 claims
- 0386US12468235B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2024·Granted Nov 11, 2025·0 cites·20 claims
- 0482US11143972B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →